AGC in collaboration with Ionics launches the first large area Ion implantation machine for treating flat panels up till a dimension of 1600 mm x 1800 mm

Ion implantation technology is already extensively used within the semi conductor industry . However, till recently, this surface modification technology was not accessible for the treatment of large areas. AGC and Ionics are now making the technology available for large area treatment up till a dimension of 1600 mm x 1800 mm with the development of an ion implantation machine “IonPRO” using electron cyclotron resonance (ECR) ion sources. AGC has focused on the surface alteration of ceramic materials, like float glass and Sapphire. Ion implantation allows improving the scratch resistant of ceramics. Alternatively, a refractive index gradient is created by cavities implanted into the glass surface resulting in anti-reflective surfaces without parasitic absorption in UV nor IR spectrum and with a remarkable angular stability. The realization of this large area ion implantation machine was done within the Walibeam initiative and is supported by Wallonia and Europe via the ERDF funds.