AGC and IONICS present Ionlab 400 in Hannover
AGC Plasma Technology Solutions in partnership with IONICS Surface Technologies present their first Ionlab 400 instrument at Hannover Messe 2018.
This equipment is dedicated for performing R&D about the ion implantation technology. Ion implantation, already widely used for semiconductor device manufacturing, is an effective technology for introducing impurities into the surface layer of the substrate and hence changing the material properties. AGC has, for example, developed this technology as an effective anti-reflective treatment on sapphire and glass and is looking for partnerships to bring this technology to mass production.