Semi-industrial line for small series production
The semi-industrial production line is an efficient and reliable platform that is specifically designed for small serial production runs with outstanding reproducibility and process control.
The system features an entry lock that also serves as an exit lock. The process zone is modular and can be easily customized to meet the specific needs of the application. This allows the user to equip the system with the exact number of deposition sources required for the layer stack. The system can grow with the needs of the customer and without requiring a complete system overhaul.