Semi-industrial line for small series production

The semi-industrial production line is an efficient and reliable platform that is specifically designed for small serial production runs with outstanding reproducibility and process control.

The system features an entry lock that also serves as an exit lock. The process zone is modular and can be easily customized to meet the specific needs of the application. This allows the user to equip the system with the exact number of deposition sources required for the layer stack.  The system can grow with the needs of the customer and without requiring a complete system overhaul.


  • Flexible tool for prototype realization for market evaluation and small-scale production
  • Minimal footprint on manufacturing floor
  • Substrate can move in both directions under the deposition sources enabling complex layer stacks with minimal capital investment
  • In-vacuum metrology available

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